SVCS Process Innovation
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    • High temperature processes in SiC semiconductor technology
    • ALD Single Wafer Reactors
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    • Ultra High Purity Gas Delivery Systems
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    • Bubbler
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  • Services
    • Retrofittings, refurbishments and upgrades of equipment
    • Ultra High Purity Infrastructure Hook-Up
    • Control system engineering & process automation
    • Equipment Engineering & Process Support
    • Accredited Calibration Laboratory with MFC Service Center
    • UHP parts and components distribution
  • News
  • References
  • Contacts
    • Career
  • About SVCS
    • News & Events
    • Our Journey Through Time
    • About Us
    • History
    • Downloads
    • Partners
    • GDPR
  • R&D
    • High temperature processes in SiC semiconductor technology
    • ALD Single Wafer Reactors
  • Products
    • Horizontal Furnaces
    • Vertical Furnaces
    • Compact Tabletop Furnace
    • Equipment for Solar Cell Production
    • Ultra High Purity Gas Delivery Systems
    • Ultra High Purity Liquid Delivery Systems
    • EBS – External Burn System
    • Bubbler
    • SV-Con Control System
  • Services
    • Retrofittings, refurbishments and upgrades of equipment
    • Ultra High Purity Infrastructure Hook-Up
    • Control system engineering & process automation
    • Equipment Engineering & Process Support
    • Accredited Calibration Laboratory with MFC Service Center
    • UHP parts and components distribution
  • News
  • References
  • Contacts
    • Career
SVCS Process Innovation SVCS Process Innovation
  • English
  • Русский
  • Czech
  • About SVCS
    • News & Events
    • Our Journey Through Time
    • About Us
    • History
    • Downloads
    • Partners
    • GDPR
  • R&D
    • High temperature processes in SiC semiconductor technology
    • ALD Single Wafer Reactors
  • Products
    • Horizontal Furnaces
    • Vertical Furnaces
    • Compact Tabletop Furnace
    • Equipment for Solar Cell Production
    • Ultra High Purity Gas Delivery Systems
    • Ultra High Purity Liquid Delivery Systems
    • EBS – External Burn System
    • Bubbler
    • SV-Con Control System
  • Services
    • Retrofittings, refurbishments and upgrades of equipment
    • Ultra High Purity Infrastructure Hook-Up
    • Control system engineering & process automation
    • Equipment Engineering & Process Support
    • Accredited Calibration Laboratory with MFC Service Center
    • UHP parts and components distribution
  • News
  • References
  • Contacts
    • Career

R&D Projects

  • High temperature processes in SiC semiconductor technology

    Research and development of  SiC VTR  with support of Technology Agency of the Czech Republic – Project FW10010021 in TREND...read more

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  • New Czech-Japan R&D project: ALD reactor for Minimal Fab design

    SVCS Process Innovation and HORIBA STEC will cooperate in the development of Minimal Fab design of the Plasma Enhanced Atomic...read more

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  • New plasma-activated ALD system with a unique source of low-temperature plasma

    SVCS Process Innovation and ISAC research teams will design together a plasma based ALD and ALEt equipment. The research will start with the standard ALD reactor design produced by ISAC, and plasma generation systems, gas and precursor distribution and controlling skills will be provided by SVCS.

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  • Experimental development of MOCVD equipments for high temperature growth of A(III)B(V) semiconductors

    Experimental development of MOCVD apparatus for high temperature growth of A(III)B(V) semiconductors and applied research of metal-nitrides epitaxial thin film growth

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  • New design of the production

    The major design improvements include smooth lines of the frames that simplify the construction and bring new modern image

    Read article
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