New design of the production16/8/2017
The team of professors and PhD students from the Institute of the Industrial Design of the Technical University in Brno (Czech Republic) with Doc. Ladislav Krenek, ArtD. in the head, provides its clients with innovative design solutions that are both functional and inspiring. This was the main motto of common project of the Institute with SVCS mechanical engineers. SVCS is coming with a new line of horizontal diffusion furnaces that includes automation for loading and unloading wafers. The furnaces will be not only innovated by its functional parameters, but also by its outward appearance. The major design improvements include smooth lines of the frames that simplify the construction and bring new modern image. The rules developed by the Institute are applicable for full product range manufactured by SVCS – including gas cabinets and other gas, vapor and liquid delivery systems.
SVCS Process Innovation and ISAC research teams will design together a plasma based ALD and ALEt equipment. The research will start with the standard ALD reactor design produced by ISAC, and plasma generation systems, gas and precursor distribution and controlling skills will be provided by SVCS.Read article
Experimental development of MOCVD equipments for high temperature growth of A(III)B(V) semiconductors
Experimental development of MOCVD apparatus for high temperature growth of A(III)B(V) semiconductors and applied research of metal-nitrides epitaxial thin film growthRead article