Precursor Temperature Controller

Many reaction constituents for semiconductor and PV processes are available only in liquid phase. We adopted suitable delivery systems to make them usable for technology process. One of the methods is based on liquid vapor pick-up by flowing gaseous media through the liquid. Flow of such carrier gas is controled by eletronic MFCs and is introduced to liquid container through a dip-tube while a carrier vapor mixture leaves the container through separate top outlet. In order to maintain the same pick-up rate during the whole process and from process to process, liquid media temperature has to be precisely controlled. We developed proprietary powerful combined cooling/heating engine for dry bath environment.

Technical data

Dimensions W x H x D (mm) 320 x 240 x 320
Diameter of the liquid container 145-155mm
Weight 15kg
Max. power consumption 150 W
Max. heating, relative to ambient +50°C
Max. cooling, relative to ambient -20°C
Regulation accuracy +/-0.1°C
Cooling power 30 W


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