About Us

SVCS Process Innovation designs and manufactures batch horizontal and vertical diffusion, PECVD and LPCVD furnaces for the semiconductor and photovoltaic industries, or related R&D institutes. Other products include various gas source systems like gas cabinets, valve manifold boxes and custom equipment gas manifolds. The heart of all SVCS tools is in-house designed control system that is often used for refurbishment of third party equipment.

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Our Experience

SVCS  experience is based on a long history of the semi- conductor industry in former Czechoslovakia. Besides the domestic market, the installation base, supported by SVCS local offices and distributors,  include China, Taiwan, Russia, India, Korea, Malaysia, Turkey and other European countries.

SVCS participates in the EU-funded research programs to achieve higher solar cell efficiency. SVCS was awarded as the best exporter of 2009 in the SME sector in DHL/HSBC contest supported by the Czech ministry of the Industry and Trade.

Key features

The key features include high process uniformity, large production capacity, reduced maintenance and a state-of- the-art control system with a customized and an easy-to-use user interface.

This proprietary control system can be used both for a new or refurbished equipment Other products include various UHP gas systems like source gas cabinets, valve manifold boxes, gas sticks and various equipment gas systems.

Selected References

Monash University Melbourne / Australina
BESU University Kolkata / India
Indian Institut of Technology (IIT) / India
R&D Pune / India
Beyondsun, Huzhou / China PRC
Czech Academy of Science / Czech Republic
ON Semiconductor / Czech Republic
ON Semiconductor / Malaysia
Nano Device Laboratories, Hsinchu / Taiwan ROC
ABB Prague / Czech Republic
IMI Norgren CZ / Czech Republic
AGH University Krakov / Poland
ST Microelectronics / Italy
Precizika-MET, Vilnius / Lithuania

Ioffe Institute of Physics, St.Petersburg / Russia
Ioffe Institute of Physics, St.Petersburg / Russia
MIKRON, Moscow-Zelenograd / Russia
Angstrem, Moscow-Zelenograd / Russia
Institute of Physics, Troitsk / Russia
EPIEL, Moscow-Zelenograd / Russia
Pulsar, Moscow / Russia
Whisker, Moscow / Russia
NIIFI Pemza / Russia
NIIIS Nizhny Novgorod / Russia
CEEG (China Sunergy), Nanjing / China PRC
Yingli Solar, Baoding / China PRC

and more

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