The EBS (Ex-Torch) is a diffusion furnace accessory used for pyrogenic oxidation processes. It generates high purity water vapor by burning Hydrogen in Oxygen. This burning is made in an external quartz chamber so the process tube working zone is not affected by hydrogen flame. Heating to Hydrogen self ignition temperature is achieved with electrical resistance heater.
Though this way of heating is not the fastest one, its robustness and durability pays off the inconvenience to start with heating a bit earlier in the process recipe.
Mechanicaly, EBS consists of two parts. A quartz combusting chamber is fixed in a polished stainless steel case together with heaters and a flame detector. The temperature controler with solid state relay and display are placed in a separate electronics box.
Bruno MERCIER – Business Partner
Expert in Microelectronics, MEMS and Clean room environment
Tel : + 33 6 62 47 30 42
10, rue des Mirages
- Hong Kong
IndiaH. Fillunger & Co.Pvt.Ltd.
Opp: Empire Estate
Pimpri, Pune 411 018 (India)
Phone No.: +91-20-27468616/18, +91-9763718050
Fax No.: +91-20-27468615
http://www.fillunger.com/H. Fillunger & Co.Pvt.Ltd.
205, 2nd Floor, Shivlok House II,
Karampura Commercial Complex,
New Delhi 110 015
Tel. No.: +91-11-42488019 / 25415789
Fax No.: +91-11-42488018
Mr. Sunil Notaney, Asst. Sales Manager
1819 Main Street
Sarasota • Florida 34236 • USA