The EBS (aka Ex-Torch) is a diffusion furnace accessory used for pyrogenic oxidation processes. It generates high purity water vapor by burning Hydrogen in Oxygen. This burning is made in an external quartz chamber so that the process tube working zone is not affected by hydrogen flame.
Heating to Hydrogen self ignition temperature is achieved with electrical resistance heater. Though this way of heating is not the fastest one, its robustness and durability pays off the inessential inconvenience to start with heating a bit earlier in the process recipe. The temperature control is made with industry standard PID Controler with sensing thermocouple and solid state relay switching. Safety is assured by a reliable flame detector with its output connected to interlock system, that also supervise H₂ and O₂ flow ratio as well as self ingition temperature. Mechanicaly EBS consists of two parts. A quartz combusting chamber is fixed in a polished stainless.
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