Compact Tabletop Furnaces

R&D

Unique Compact Design, All Features of the Grown-up Furnace

The SVCS Tabletop Furnace system provides a semiconductor grade quality tool for universities, R&D laboratories and pilot fabs. This system can be used for wide range of processes due to outstanding flexibility and amount of optional modules available to meet special and often unique requirements of every customer.

Atmospheric Processes

Diffusion (drive-in) high temperature procesess
Doping from solid, liquid and gaseous dopant sources e.g.: BBr₃, B₂H₆, POCL₃, PH₃, BN
Various thermal processing e.g. annealing, sintering
Pyrogenic Wet Oxide with External Burning System
Wet Oxide with ultra pure steamer
Dry Oxide
HiPOx (High Pressure Oxide)

LPCVD Processes

Silicon nitride
Low temperature oxide (LTO)
High temperature oxide (HTO)
TEOS oxide
Polysilicon, with tilt/flat temperature profile
Doped polysilicon
Oxynitride

PECVD Processes

Silicon nitride (incl. anti-reflective SiN solar cell coating)
Silicon oxide
Oxinitride

DCE or HCl optional for all processes

Features and Benefits

Ideally suited for R&D labs and pilot fabs
Small footprint
Table or standalone solution (with stands)
Stackable desing (e.g. double tabletop variant)
Low power consumption
Easy operation and maintenance
Heating element with 1 or 3 temperature zones and max. temperature up to 1300 °С
Modern modular proprietary control system
Up to 8 gas lines and 2 liquid sources
Independent hardware safety interlocks
Integration of vacuum pump systems in cooperation with leading pump manufacturers

Technical Data

Wafer size	2″ – 6″ (50 mm – 150 mm)
Wafer load	up to 25 wafers/batch
Heating system	1 or 3 zone, helical Kanthal® APM/A1 wire
Flat zone	12″ (300 mm)
Process temperature	200 ^oC – 1300 ^oC, ± 0.5 ^oC across flat zone
Power consumption	20 kVA total
Power supply	3-phase, 400 or 480VAC, 50 A, 50 or 60 Hz (system is always adapted to country- specific power supply network)
Clean dry air	70 – 110 psig (4,8 to 7,6 bar)
Cooling water	40 – 60 LPM
Exhaust	210 m³/h
Options	CEM unit, EBS system, facility equipment

Download

Compact Tabletop Furnaces R&D (pdf) Brochure sheet

Contact our local representative for more information

Show global contacts

Singapore
Singapore
Sam Chan
Regional Business Network Pte Ltd
16 New Industrial Road
#04-08 Hudson Technocentre
Singapore 536204

Tel: (65) 62809650
Fax: (65) 62809675
Mobile: (65) 96170912

Web: www.rbnpl.com
Germany
Germany
European Market Partner BV
Park Reeburg 27
5261 GC Vught
The Netherlands

Tel: +31 495 54 58 17
Cell: +31 6 24 759685
Email:
Netherlands
Netherlands
European Market Partner BV
Park Reeburg 27
5261 GC Vught
The Netherlands

Tel: +31 495 54 58 17
Cell: +31 6 24 759685
Email:
France
France
Bruno MERCIER – Business Partner
Self entrepreneur
Expert in Microelectronics, MEMS and Clean room environment
Tel : + 33 6 62 47 30 42
Email:

172 Rue des Bauges

74210 Doussard

FRANCE
Hong Kong + Taiwan
Hong Kong + Taiwan
Great Domain
Mark Chang
Enterprise Co., Ltd.
15-1F, No.37, Sec. 2, Sanmin Rd.,
Banqiao Dist., New Taipei City, Taiwan
Tel.: 0912-730-586
Fax: 0289538399
Email:
Vietnam
Vietnam

AMST., CO. Ltd.
Mrs. Le Thi Thu Huong
48A, Alley 21 Phan Dinh Giot Str.
Thanh Xuan Dist., Hanoi
Vietnam
Tel: +84 2466831909

Mobile: +84902245626
Email: info@amst.com.vn / sales@amst.com.vn

Web: www.amst.com.vn
Australia
Australia
UHP Australia Ply Ltd.
Unit 4, 20 Velediclion Road, Kings
Park NSW 2148, AUSTRALIA
Tel.: +61 (0)2 9676 6769
Mob.: +61 (0) 3904 3893
Email:
Japan
Japan
VYTEK Ltd.
Mr. Vladimir Kovacik
Wisteria Komae bldg.3F
1-2-8 Izumi Honcho, Komae, Tokyo, 201-0003 Japan
Tel.:+81-3-3480-9082
Fax:+81-3-3480-9083
Email:
http://www.vytek.co.jp/
Korea
Korea
Sang-Hoon, Lee (Mr. Edward Lee)
Managing Director of SH Korea
#310-213, Ansan Distribution Complex
994-6, Wongok-dong, Danwon-gu,
Ansan-si, Gyeonggi-do, Korea.
zip code 15431
Fax: +82.31.8084.4744
web-site: www.shkorea.kr
Mobile: 82-10-4307-8412
Email:
Taiwan
Taiwan
Sung Yuan Biotechnology Co., Ltd.
Mr. Thomas Liu
Sales Director
No.818, Wen-San Road, Up-Mountain village
Chung-Lin Hsiang, Hsin-Chu County 307,
Taiwan R.O.C
Tel: +886-3-5122.096 ext 101
Fax: +886-3-5925.308
Mobile: +886-938-365.326
Email:
Email:
China
China
PELAS
Mr. Tony Wang
Shanghai PelaStar Materials Technology Co., Ltd
Room. 1102, Suncome Liauw’s Plaza, No. 738, Shangcheng Rd.Shanghai, 200120, China
Tel.: 86-21-51981110
Fax.: 86-21-51981109
Mobile: 13816658585
Email:
Malaysia
Malaysia
SERMAX Engineering Pte Ltd (201025665Z)
11 Mandai Estate, #08-01 Eldix, Singapore 729908
Phone : +65-6710 7710
Fax : +65-6710 7710
Email:
India
India
MCube Technologies Pvt Ltd.
204, Ashok Sankul II, Ashok Nagar,
Off Range Hills Road, Shivajinagar, Pune- 411007

Contact: Mr Akshay Patil
Mob: +91 (0) 9763 7180 58

Office: +91 (0) 2025 5606 66 (Sales)

Email:
Email:
www.mcubetechnologies.com
Russia
Russia
OOO “SVCS”
Mr. Igor Berezenko
Director
Solnechnaya alley, bld. 6, office 223
Zelenograd, 124498 Moscow
Russia
Phone: +7 495 790 63 31
Email:
https://www.svcs.com
Turkey
Turkey
TESTONE TEKNOLOJI COZUMLERI SAN. VE TIC LTD. STI.
Gürsel Mah. İkbal Sok TestOne Binası No :7
Kağıthane-İstanbul
Tel: 0212 251 24 25
Fax: 0212 222 90 90
Email:
USA
USA
SVCS CO.
1819 Main Street
Sarasota • Florida 34236 • USA
www.svcs.com
Email: