Products
Scallable for Production or R&D Applications
SVCS Vertical Thermal Reactor (VTR) is designed for all standard atmospheric and low pressure CVD processes. VTR is available with several lengths of flat zone for both mass production and R&D application. The single tube set-up with dual boat logistics is optimized for minimum down time as well as low maintenance costs.
Features and Benefits
- Automatic wafer handling system for loading wafers from SMIF or FOUP closed pods
- Special automatic loading system which allows loading wafers from open cassettes and provides an exceptionally small footprint
- Quartz or SiC boats can be used
- Highly tailored state of the art modular control system, in house designed and manufactured
- 10,4“ high-res touchscreen for operator interface
Atmospheric Processes
- Diffusion (drive-in) high temperature procesess
- Doping from solid, liquid and gaseous dopant sources e.g.: BBr3, B2H6, POCL3, PH3, BN
- Various thermal processing e.g. annealing, sintering
- Pyrogenic Wet Oxide with External Burning System
- Dry Oxide
LPCVD Processes
- Silicon nitride / low stress nitride
- Low temperature oxide (LTO)
- High temperature oxide (HTO)
- TEOS oxide
- Polysilicon, with tilt/flat temperature profile
- Doped polysilicon
- Oxynitride
DCE or HCl optional for all processes
Technical Data
| Wafer size (mm) | 100, 150, 200, 300 or any custom size |
| Wafer load | 25 – 150 wafers/batch |
| Heating system | 3 or 5 zones |
| Flat zone | up to 600 mm (24″) |
| Process temperature | 200 oC – 1230 oC, ± 0.5 oC across flat zone |
| Power consumption | 22kW – 30kW |
| Power supply (adapted to power grid of destination country) | 3-phase, 400 or 480VAC, 40 – 100 A, 50 or 60 Hz |
| Clean dry air | 70 – 110 psig (4,8 to 7,6 bar) |
| Cooling water | 10 – 15 LPM |
| Exhaust | 170 m³/h |
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Singapore
Singapore
Sam Chan
Regional Business Network Pte Ltd
16 New Industrial Road
#04-08 Hudson Technocentre
Singapore 536204Tel: (65) 62809650
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Mobile: (65) 96170912Web: www.rbnpl.com
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Germany
Germany
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Park Reeburg 27
5261 GC Vught
The NetherlandsTel: +31 495 54 58 17
Cell: +31 6 24 759685
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Netherlands
Netherlands
European Market Partner BV
Park Reeburg 27
5261 GC Vught
The NetherlandsTel: +31 495 54 58 17
Cell: +31 6 24 759685
Email: -
France
France
Bruno MERCIER – Business Partner
Self entrepreneur
Expert in Microelectronics, MEMS and Clean room environment
Tel : + 33 6 62 47 30 42
Email:172 Rue des Bauges
74210 Doussard
FRANCE
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Hong Kong + Taiwan
Hong Kong + Taiwan
Great Domain
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Enterprise Co., Ltd.
15-1F, No.37, Sec. 2, Sanmin Rd.,
Banqiao Dist., New Taipei City, Taiwan
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Fax: 0289538399
Email: -
Vietnam
Vietnam
AMST., CO. Ltd.
Mrs. Le Thi Thu Huong
48A, Alley 21 Phan Dinh Giot Str.
Thanh Xuan Dist., Hanoi
Vietnam
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Email: info@amst.com.vn / sales@amst.com.vnWeb: www.amst.com.vn
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Australia
Australia
UHP Australia Ply Ltd.
Unit 4, 20 Velediclion Road, Kings
Park NSW 2148, AUSTRALIA
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Mob.: +61 (0) 3904 3893
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Japan
Japan
VYTEK Ltd.
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Wisteria Komae bldg.3F
1-2-8 Izumi Honcho, Komae, Tokyo, 201-0003 Japan
Tel.:+81-3-3480-9082
Fax:+81-3-3480-9083
Email:
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Korea
Korea
Sang-Hoon, Lee (Mr. Edward Lee)
Managing Director of SH Korea
#310-213, Ansan Distribution Complex
994-6, Wongok-dong, Danwon-gu,
Ansan-si, Gyeonggi-do, Korea.
zip code 15431
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web-site: www.shkorea.kr
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Taiwan
Taiwan
Sung Yuan Biotechnology Co., Ltd.
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Sales Director
No.818, Wen-San Road, Up-Mountain village
Chung-Lin Hsiang, Hsin-Chu County 307,
Taiwan R.O.C
Tel: +886-3-5122.096 ext 101
Fax: +886-3-5925.308
Mobile: +886-938-365.326
Email:
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China
China
PELAS
Mr. Tony Wang
Shanghai PelaStar Materials Technology Co., Ltd
Room. 1102, Suncome Liauw’s Plaza, No. 738, Shangcheng Rd.Shanghai, 200120, China
Tel.: 86-21-51981110
Fax.: 86-21-51981109
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Malaysia
Malaysia
SERMAX Engineering Pte Ltd (201025665Z)
11 Mandai Estate, #08-01 Eldix, Singapore 729908
Phone : +65-6710 7710
Fax : +65-6710 7710
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India
India
MCube Technologies Pvt Ltd.
204, Ashok Sankul II, Ashok Nagar,
Off Range Hills Road, Shivajinagar, Pune- 411007Contact: Mr Akshay Patil
Mob: +91 (0) 9763 7180 58Office: +91 (0) 2025 5606 66 (Sales)
Email:
Email:
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Russia
Russia
OOO “SVCS”
Mr. Igor Berezenko
Director
Solnechnaya alley, bld. 6, office 223
Zelenograd, 124498 Moscow
Russia
Phone: +7 495 790 63 31
Email:
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Turkey
Turkey
TESTONE TEKNOLOJI COZUMLERI SAN. VE TIC LTD. STI.
Gürsel Mah. İkbal Sok TestOne Binası No :7
Kağıthane-İstanbul
Tel: 0212 251 24 25
Fax: 0212 222 90 90
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USA
USA
SVCS CO.
1819 Main Street
Sarasota • Florida 34236 • USA
www.svcs.com
Email: